The Polymer Society of Korea

Abstract

Random-network carbon nanotube (CNT) field-effect transistors (FETs) often suffer from large device-to-device variability due to nonuniform CNT density, multilayer stacking, and the poor stability of physically adsorbed channels. In this work, we propose a SAM-assisted chemical anchoring strategy to achieve uniform and stable CNT channels over large areas. CNTs are chemically immobilized onto a self-assembled monolayer (SAM) on the gate dielectric via UV-induced bonding, followed by a washing process that selectively removes unbound CNTs. This process effectively suppresses CNT stacking and ensures uniform CNT density across the substrate. Combined with spray coating, this approach enables large-area deposition with low CNT ink consumption and wafer-scale fabrication of highly uniform device arrays. As a result, device-to-device variation is significantly reduced, demonstrating scalable and reliable random-network CNT FETs fabrication for various electronic and sensing applications.