Ultrathin and Pinhole-Free Pyridinophane Polymer Films via CVD for Dielectric Layers
발표자
박원경 (충남대학교)
연구책임자
이경진 (충남대학교)
공동저자
박원경 (충남대학교), 이경진 (충남대학교)
초록
내용
Conventional PPx-based polymers have a structure in which two benzene rings are connected by bridged. It has been studied a lot to change physical properties by adding a functional group to the side chain of a monomer. However, there are relatively few studies to add other atoms to the main chain. In particular, replacing benzene units with pyridine rings can impart distinct chemical and electrical characteristics. Pyridinophane monomers can be deposited as highly uniform, and pinhole-free films via CVD (chemical vapor deposition). In this work, pyridinophane monomers were synthesized and characterized, and their polymer thin films were fabricated via CVD. Pyridinophane is investigated as a dielectric material of TFTs in this study. The polymer-film properties were evaluated to assess their feasibility for future electronic device applications. The thin-film properties of pyridinophane polymers were evaluated to assess their potential applicability in electronic devices.