Orthogonal photopatterning of two-dimensional percolated network films for wafer-scale heterostructures
발표자
곽인철 (연세대학교)
연구책임자
조정호 (연세대학교)
공동저자
곽인철 (연세대학교), 김지현 (MIT), 강주훈 (연세대학교), 조정호 (연세대학교)
초록
내용
Molecular intercalation-based electrochemical exfoliation of two-dimensional (2D) materials can be used to create van der Waals heterostructures. However, the scalable assembly of vertical heterostructures typically requires the use of various chemical solvents for photolithography and subsequent transfer, which can leave behind chemical residues and limit the patterning resolution. We show that patterned van der Waals heterostructures can be fabricated from electrochemically exfoliated 2D flakes using a photoreactive crosslinker. When a 2D van der Waals percolated network with the crosslinker is exposed to ultraviolet light, the network junctions form covalent bonds, thereby enabling improved charge transport and orthogonal patterning of vertically stacked van der Waals thin-film networks without affecting the underlying prepatterned layers.