Precision synthesis of fluorine- and poly(4-hydroxystyrene)-containing linear and star copolymers via living anionic polymerization and selective deprotection
발표자
안준태 (숭실대학교)
연구책임자
강범구 (숭실대학교)
초록
내용
In this research, we synthesized three types of well-defined copolymers containing poly(4-hydroxystyrene) (PHS) segments via living anionic polymerization in tetrahydrofuran (THF) at –30 °C for 10 minutes, using sec-butyllithium (sec-BuLi) as the initiator. Also, selective deprotection of the copolymers was subsequently carried out using tetra-n-butylammonium fluoride (TBAF) in THF at room temperature. The first polymer is a linear copolymer synthesized from protected 4-hydroxystyrene monomers. Based on this approach, the second polymer was further modified at the chain end-functionalized with a chlorosilane containing fluorine groups, which are known for their high EUV absorbance. The third polymer is a well-defined 3-arm star copolymer formed by coupling linear arms synthesized as in the first polymer with a fluorinated trichlorosilane coupling chemistry.These materials were designed for potential use in extreme ultraviolet (EUV) photoresist applications.