Synthesis of parylene film with functional group via CVD process and its characterization.
발표자
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초록
내용
Parylene film synthesized with CVD is widely used as a passivation layer in electrical/electronic and medical/bio fields because it shows high stability even in external stress such as moisture, dust, temperature, and humidity. However, since the number of commercialized Parylene monomers that can be obtained in Korea is limited, Research on the synthesis of monomers is important to ensure Parylene monomers with various functional groups. Therefore, we study Parylene with various functional groups such as Parylene-CHO, Parylene-OH synthesized from Parylene-N and find optimal conditions for synthesizing polymers using CVD process. In short, we sugggest several monomers synthesized from Parylene-N and applications. Then, we think it can be applied to various fields such as PEMFC separator (ePTFE), rechargeable battery, stretchable display, and TFT (thin film transistor).