Anionic polymerization of 4-alkoxystyrene-based monomers and deprotection by PAG.
발표자
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초록
내용
The purpose of this study is to find a condition for anionic polymerization of 1-(1-ethoxyethoxy)-4-vinylbenzene, 4-tert-butoxystyrene, and 4-(2-tetrahydropyranyloxy)styrene with a molecular weight of 7000~10000 g/mol and an MWD of 1.10 or less. Polymerization was carried out at -40℃ for 24 hours, and as a result of 1H-NMR and GPC analysis, a polymer having a molecular weight of 7000 to 9000 g/mol and an MWD of 1.06 was synthesized. The synthesized homopolymer was mixed with a solvent and a photoacid generator, then spin-coated on a silicon wafer and deprotected through a 248 nm exposure process. Finally, solubility changes with several solvents were observed, and etching with basic solutions was evaluated.