Electrolyte-gate field-effect transistor based biosensor using amorphous oxide semiconductor
발표자
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초록
내용
Field effect transistors (FETs) are being used in various ways in the field of biosensors. In this study, a biosensor using an amorphous oxide semiconductor based electrolyte-gate field-effect transistor was fabricated. We manufactured the device by adjusting the composition ratio of the amorphous oxide semiconductor to manufacture the device of various performances. We created three types of FET biosensors with this device with different performances. The manufactured biosensor was able to detect Tau of various concentrations successfully. In addition, the sol-gel process of the semiconductor film and the surface treatment of the sensing region are performed through a solution process, which has the advantage of fabricating the sensor in a simple and low-cost method.