Nano-crack formation on the micro-structure for piezo-resistive pressure sensor with high linearity and flexibility
발표자
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초록
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A piezo-resistive type pressure sensor with high stretchability and linear sensitivity was developed via the in-situ formation of nano-cracks and micro-wrinkles on pyramidal elastomers using the tensile/compressive residual stress applied on metal thin film. The nano-cracks generated in the process of thermal evaporation improved the stretchability, and the micro-wrinkles formed during the deformation of pyramidal structure helped to achieve the linear sensitivity. Furthermore, our pressure sensor maintained its sensing performance even after repeated pressure cycle tests due to high interfacial adhesion between the surface thiolated elastomer and the deposited metal thin film.