Sputtered Metallic Glass Thin Film Electrodes for Flexible Strain Sensors and Organic Photovoltaics
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In this research, metallic glasses (MGs), with various compositions are sputtered into thin films for thin film devices’ electrodes. MG is an amorphous metal without long-range crystalline structure, compared to conventional polycrystalline metals. Due to absence of grain boundaries, MG possesses remarkable mechanical and chemical stability, which is advantageous for thin film flexible devices such as strain sensors and organic photovoltaics. Specifically, electrical properties of the sputtered MG films were investigated, and we found that fabricating MG with Zr-based atomic composition is suitable for fabrication of bending sensor with high reliability, and with high stability against oxidation. Furthermore, Al-based MG thin film exhibited appropriate conductivity and work function, which allowed the fabrication of chemically stable electrode for organic photovoltaics.