ORS3-0024
Nanostructured and Functionalized Materials through Soft Materials-Derived Nano-Lithography
When and Where
Nov 30, -0001
12:00am - 12:00am
Presenter(s)
JAE HONG PARK (National Nanofab Center)
Co-Author(s)
Abstract
The main processes of engineering nanostructures are the top-down method, which is a direct engineering method for Si-type materials using photolithography or e-beam lithography. However, this direct engineering method of nano-structuring is very dependent on sensitive equipment, and have a high process cost. These are also relatively inefficient methods in terms of processing time and energy. Therefore, some researchers have studied the replication of nano-scale patterns via the soft lithographic concept, which is more efficient and requires a lower processing cost.
In this study, accurate nanostructures with various aspect ratios are created on several types of materials. A silicon (Si) nano-mold is preserved using the method described, and target nanostructures are replicated reversibly and unlimitedly to or from various hard and soft materials. The optimum method of transferring nanostructures on polymeric materials to metallic materials using electroplating technology was also described. Optimal replication and demolding processes for nanostructures with high aspect ratios, which proved the most difficult, were suggested by controlling the surface energy between the functional materials. Relevant numerical studies and analyses were also performed. Our results showed that it was possible to realize accurate nanostructures with high depth aspect ratios of up to 1:20 on lines with widths down to 50 nm.
In addition, we were able to expand the applicability of the nano-structured mold by adopting various backing materials, including a rounded substrate. The application scope was extended further by transferring the nanostructures between different types of materials with a reversible way, as well as an identical species of material.
In particular, the materials and methodologies which were suggested in this research provide the great possibility of commercially creating nanostructures as combined with an effective and reliable way. Such commercially creatable nanostructures are required for a vast range of optical parts and display devices, photonic components, physical parts and devices, energy devices, vehicles and buildings on/in the land, water or marine, and biomimetic or biosimilar structured parts and devices for antibiosis
In this study, accurate nanostructures with various aspect ratios are created on several types of materials. A silicon (Si) nano-mold is preserved using the method described, and target nanostructures are replicated reversibly and unlimitedly to or from various hard and soft materials. The optimum method of transferring nanostructures on polymeric materials to metallic materials using electroplating technology was also described. Optimal replication and demolding processes for nanostructures with high aspect ratios, which proved the most difficult, were suggested by controlling the surface energy between the functional materials. Relevant numerical studies and analyses were also performed. Our results showed that it was possible to realize accurate nanostructures with high depth aspect ratios of up to 1:20 on lines with widths down to 50 nm.
In addition, we were able to expand the applicability of the nano-structured mold by adopting various backing materials, including a rounded substrate. The application scope was extended further by transferring the nanostructures between different types of materials with a reversible way, as well as an identical species of material.
In particular, the materials and methodologies which were suggested in this research provide the great possibility of commercially creating nanostructures as combined with an effective and reliable way. Such commercially creatable nanostructures are required for a vast range of optical parts and display devices, photonic components, physical parts and devices, energy devices, vehicles and buildings on/in the land, water or marine, and biomimetic or biosimilar structured parts and devices for antibiosis
