POS2-0639
Additive-Induced Segmental Dynamics in PR-like Polymer Thin Films Probed by Broadband Dielectric Spectroscopy
Topic
S2. High-End Characterization/Polymer Physics/Properties
When and Where
Sep 29, 2026
08:30 - 09:30
Room 301 (Grand Ballroom)
Session Chairs
Hae Jung SON
Boseok KANG
Presenter(s)
seongeun kim (Seoul national university)
Co-Author(s)
Abstract
As extreme ultraviolet lithography advances toward the high-NA regime, photoresist (PR) films must satisfy stricter requirements to enhance resolution and line-edge roughness. Achieving these performance targets requires precise control of acid diffusion and reaction uniformity, but additive distribution and local polymer dynamics can introduce dynamic heterogeneity, making such control difficult in multicomponent chemically amplified resist (CARs). To address this complexity, broadband dielectric spectroscopy (BDS) is used to probe dynamic heterogeneity in PR-like polymer films. BDS monitors the frequency- and temperature-dependent dielectric response of polymer dipoles, allowing segmental relaxation and molecular mobility to be evaluated. However, direct incorporation of actual PAGs and quenchers can complicate experimental dielectric analysis because their ionic or highly polar nature may increase conductivity and electrode polarization. Therefore, a simplified PR-like formulation is designed using poly(4-vinylphenol-co-methyl methacrylate) (PHS-co-PMMA) and non-ionic model additives. The PHS units contain CAR-relevant phenolic hydroxyl groups that can interact with additives, leading to local mobility constraints and dynamic heterogeneity. In contrast, the methacrylate units provide a relatively non-reactive environment, allowing PHS-specific additive interactions to be distinguished from general additive-induced effects. This model formulation enables clearer dielectric interpretation of reaction-driven changes in segmental dynamics. BDS, together with FTIR, ellipsometry, and solvent-resistance analysis, is used to verify whether additives induce chemical interactions or crosslinking and how these changes affect film stability, glass transition behavior, and segmental dynamics. By probing changes in segmental dynamics, this study provides a model framework for understanding and addressing dynamic heterogeneity in high-NA PR materials.
