Synthesis and characterization of eco-friendly water-processable photoresists containing photo-reversible coumarin groups
발표자
()
초록
내용
In this study, water-soluble polymers with photo-reversible coumarin groups were synthesized as eco-friendly, water-processable photoresists. These polymers do not require photoinitiators or photoactive compounds and can function as both negative- and positive-type photoresists by controlling exposure conditions. The 7-(4-vinyl-benzyloxyl)-coumarin (VBCC) was synthesized through etherification of 4-vinyl benzyl chloride and 7-hydroxycoumarin, followed by polymerization with sodium p-styrene sulfonate (NaSS) for water solubility. The photo-reversible reaction of P(VBCC-co-NaSS) was confirmed via UV-Vis and FT-IR spectroscopy. Under 365 nm UV exposure, a cyclobutane ring formed, which reverted to its original structure under DUV exposure. The water solubility of P(VBCC-co-NaSS) increased with higher NaSS content, at the expense of photo-speed. Well-defined negative- and positive-type patterns were achieved, highlighting P(VBCC-co-NaSS) as an environmentally friendly, water-processable, and photo-reversible photoresist.