Development of Low-Cost Amorphous Oxide Semiconductor-Based FET Biosensors for Biomolecular Detection
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초록
내용
Field-effect transistors (FETs) are being utilized in various ways in the field of biosensors. This study focuses on the fabrication of a biosensor using an amorphous oxide semiconductor-based electrolyte-gate FET. By adjusting the composition ratio of the amorphous oxide semiconductor, we manufactured devices with varying performances. Three types of FET biosensors were created, each demonstrating different levels of performance. The fabricated biosensors successfully detected Tau at various concentrations. Furthermore, the sol-gel process for the semiconductor film and the surface treatment of the sensing region were performed via a solution process, providing the advantage of simple and low-cost fabrication. This development shows significant potential for creating efficient, scalable, and cost-effective biosensors for detecting biomarkers in various biomedical applications.