Nanoimprinted Semiconductor Surfaces for fM Sensitivity in Electrolyte-Gated Field-Effect Transistor Biosensors
발표자
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초록
내용
Biosensors are vital devices used to detect and quantify biological analytes in samples, with electrolyte-gated field-effect transistors (EGFETs) particularly suited for point-of-care diagnostics (POCD). However, electrolytes in this system lead to the formation of electrical double layers (EDLs) on the semiconductor surface, causing Debye screening that interferes with surface potential changes, significantly reducing sensor sensitivity. To address this, nanoimprint lithography was used to create nanoscale patterns on the semiconductor surface. Patterns from optical discs were transferred onto the semiconductor surface using poly(dimethylsiloxane) (PDMS) as a template. These nanoscale patterns effectively suppress EDL formation in concave structures, reducing Debye screening and enhancing sensor sensitivity. As a result, the sensitivity of these biosensors is improved to the point where they can detect femtomolar (fM) concentrations of analytes.