Transparent Multilayered Thin-Film Passivation Based on Parylene C-AlN for OLEDs Using a Single Deposition Chamber
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A single chamber process for Poly-para-xylylene C (Parylene C) and Aluminum Nitride (AlN) multilayered transparent thin films as transparent passivation is proposed for application in organic light-emitting diodes (OLEDs). A sequential deposition in room temperature of Parylene C and AlN by using chemical vapor deposition and radio frequency reactive sputtering without changing the chamber within a short process time. The OLED fabricated using a passivation layer revealed an impactful shelf-life of 400 h at 25oC which degraded at only 24 h without the passivation film. In addition, 30% RH was measured while there was no dark spot formation at shelf-life analysis. The transparency of the multilayered passivation film exceeded 85% in the visible range. Those findings reveal the possible and efficient use of the Parylene C-AlN multilayered passivation thin film in transparent OLEDs and other organic optoelectronics devices.