Gradient Refractive Index Structures for Broadband Antireflection by Metal Ion Infiltration of Block Copolymer
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Antireflection coating (ARC) is a type of optical coating that is used to increase efficiency or performance in places such as solar cells, light-emitting diodes, and windows. Despite wide range of developments that have been carried out over the past years, the production of broadband ARC remains a challenge due to requirement of numerous layers. To solve this problem, design of the gradient refractive index structures for a broadband ARC has emerged. Self-assembly of block copolymers (BCP) can be effective due to its high resolution, easy patterning. In this work, nano structure for broadband AR was formed by combining anionic metal ion with a protonated P4VP through electrical attraction. For that, self-assembled BCP films were immersed in precursor solution and irradiated by UV to reduce metal ion. BCP films incorporated with inorganic materials were selectively etched by RIE. RIE process was thoroughly investigated to form gradient refractive index structures. The morphologies of structures were characterized by SEM and TEM. UV/VIS Spectrometer was used for optical properties.