Flexible silica thin films derived from perhydropolysilazane using photo-base generator under ultraviolet light irradiation
발표자
()
초록
내용
With the recent development of flexible devices, silicon-based polymer-derived ceramics(PDCs) have been attracting considerable attention as a hard coating material for a flexible cover window. Here, we report a flexible silica thin film by using spin coating a stabilized perhydropolysilazane(PHPS) solution with o-acyloxime-based photo-base generator(PBG). The PBG acts as catalyst for conversion PHPS into silica film after UV irradiation. The conversion mechanism and rate were observed carefully by FT-IR and the chemical compositions were analyzed by XPS. The optical and mechanical properties of the flexible silica thin film were examined by UV spectroscopy, pencil hardness tester, nano-indenter, and folding test machine. The resulting silica films exhibited flexibility, good hardness, and transparency, simultaneously, which can be contributed to the development of flexible devices.