Synthesis and Characterization of Novel Photo-crosslinkable Polyimide Gate dielectric with the Bisphenol A Dimethacrylate Crosslinker
발표자
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초록
내용
The soluble photo-crosslinkable polyimde having vinyl group (DOCDA-6FHAB-IEM) was prepared with methacrylate esterification from the reaction of hydroxyl group containing polyimde (DOCDA-6FHAB) and NCO group containing isocyanatoethyl methacrylate (IEM). And then, DOCDA-6FHAB-IEM polymer was mixed with bisphenol A dimethacrylate (Bis-DMA) as photo-crosslinking agent and Irgacure 184 as photo-initiator. The film was irradiated with UV-visible. We have confirmed the photo-crosslinking mechanism through the FT-IR measurement. Thin film properties of crosslinked DOCDA-6FHAB-IEM+Bis-DMA film were systematically characterized such as chemical structures, surface roughness, surface energy, thermal stability, dielectric constant and capacitance, etc. Detailed film fabrication condition and thin film properties will be presented.