Low-K Polyimide with Tunable Pore Size Distribution by Thermally Induced Phase Separation
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One of the promising developments in material science today is the design and fabrication of low-k polymeric materials for beyond 5G application. It is important to introduce air space into the polymer to dramatically reduce the permittivity. Thermally induced phase separation (TIPS) is attracting attention as a competitive platform to fabricate highly porous polymeric films. However, the adjustment of parameters which control morphology and pore properties such as pore volume, pore size and specific surface area is very difficult. In this work, a thorough investigation was carried out to understand the underlying phenomena in the porous polyimide (PI) film formation kinetics during the TIPS process. It was found that the porous structure and pore sized distribution of PI films can be readily engineered by tailoring the initial content of a removable small-molecular phase dispersion agent and cage silsesquioxane.