Structural, optical, and electrical properites of Cu/plasma-polymer-fluorocarbon nanocomposite films deposited by MF sputtering
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초록
내용
Polymer-metal nanocomposite in which metal nanoparticles are dispersed in a polymer matrix exhibits excellent optical, electrical, and mechanical properties, and thus can be applied to high-tech industries such as automobiles, electronic/information, pharmaceutical/biological, and energy/environment. In this study, Cu/plasma-polymer-fluorocarbon thin films were fabricated by MF sputtering of CNT/Cu/PTFE composite target. The structural, optical and electrical properties of the thin films according to the sputtering power density were analyzed. The applicability of the antistatic film was confirmed from static electricity test.