Characterization of various phenolic resins as spin-on carbon hardmask materials
발표자
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초록
내용
In this study, various phenolic resins were evaluated as spin-on-carbon hardmask materials. Phenolic resins spin-coated on wafers were cured by using various curing methods, such as thermal curing, radiation curing, and photo-curing. The physico-chemical properties of the cured phenolic resins were investigated by DSC, TGA, XPS, and XRD. The etch selectivity of the crosslinked phenolic resins were evaluated for application as spin-on-carbon hard-mask materials.