Orientation Control of Fluorine-Containing Block Copolymers for Sub-10 nm Perpendicular Lamellae
발표자
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초록
내용
High-χ block copolymers (BCPs) have drawn attention due to the capability of forming sub-10 nm feature size, having potential to replace the conventional top-down lithography. By increasing the Flory-Huggins interaction parameter (χ), overcoming the size limit in the block copolymer is possible. However, controlling the orientation is difficult due to the large difference in surface tension of two blocks. In this study, newly designed high-χ BCPs which contains fluorine atoms were synthesized by transesterification. Sub-10 nm feature size of lamellar structures were achieved from 6.3 kg/mol BCP by the elevated χ value (7 fold higher than polystyrene-b-poly(methyl methacrylate)). Orientation control in thin film was proceed using random top coat and homopolymer mat strategies which resulted in a perpendicular lamellar structures by simple thermal annealing.