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  발표분야
분자전자 부문위원회 I
  발표구분
포스터발표Poster presentation
  발표장치
Poster
  제목
Advanced side impermeability characteristics of fluorinated organic-inorganic hybrid material for thin film encapsulation
  공동저자
  • 권혁진 (포항공과대학교, 학사, 회원)
  • 김세현 (영남대학교, 회원)
  • 박찬언 (포항공대, 회원)
  발표자
권혁진 (포항공과대학교 , Email: hj1370@postech.ac.kr, 전화: 054-279-2947
  연구책임자
박찬언 (포항공대 , Email: cep@postech.ac.kr, 전화: 054-279-2269
  키워드
thin film encapsulation (TFE), plasma enhanced atomic layer deposition (PEALD), Al2O3, fluorine, sol-gel, organic-inorganic nanohybrid
  우수논문발표상
우수논문발표상에 응모하지 않습니다
Advanced side impermeability characteristics of fluorinated organic-inorganic hybrid material for thin film encapsulation
권혁진, 김세현*, 박찬언**,†
포항공과대학교; *영남대학교; **포항공대
In the current work, we introduced Fluorine contents in organic-inorganic nanohybrid system and fabricated the moisture barrier films using atomic layer deposition (ALD) based Al2O3 and sol-gel based fluorinated hybrid material (FHM) with hybrid thin film encapsulation (TFE) type for optoelectronics. From systematic analysis on the FHM film on various substrate, it is revealed that FHM films full covers all parts of substrate with low roughness and shows high hydrophobicity and good flexibility. These results demonstrate that the FHM is able to protect Al2O3, generally known as corrosive toward water. Therefore, the TFE with Al2O3 and FHM showed excellent barrier film characteristics and high visible transmittance. Additionally, FHM film exhibited advanced side impermeability which values are comparable to oxide layer.
Keywords: thin film encapsulation (TFE), plasma enhanced atomic layer deposition (PEALD), Al2O3, fluorine, sol-gel, organic-inorganic nanohybrid